@T3P3Tony thank you very much, that solved my problem!
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Setting large Z-Probe Offset
My Z Probe is 53 mm below the nozzle tip.
When I do the delta calibration the only way to prevent the probe from crashing into the bed is setting in M558 the H parameter to 53 (although I'd expect the head to stop as soon the probe is triggered). H < 53 crashes. So I have in config.g:
M558 P4 I1 H53 F120 T3600
G31 P500 X0 Y0 Z5
Auto calibration works fine with H53 and the probe rises nicely to about 5mm above the bed between trigger points.
What sucks is that after calibration the mesh bed leveling will always start very high > 53mm and probing would take forever.
Also when I do a M500 after calibration the H value in M665 is way off.
Any idea how to work with my probe setup on Duet?