@PengMing-Zeng If you have replaced the MCU, you will need to flash a bootloader to the chip. See https://docs.duet3d.com/Duet3D_hardware/Duet_3_family/Duet_3_Mini_5+_Hardware_Overview#programming-the-bootloader
Our bootloader is here: https://github.com/Duet3D/uf2-samdx1/releases
Use the file named "bootloader-Duet5LC-v3.10.0-11-gd94e19e.elf"
Ian