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fixed.
I did the full calibration again.
Thanks
@chaosfreak If you send an M557 command in the gcode console with a very small spacing set, it will probably be more points than it can support, and the error message it gives you will suggest the smallest spacing possible for you to use.
https://duet3d.dozuki.com/Wiki/Gcode#Section_M557_Set_Z_probe_point_or_define_probing_grid