@owend Loging work fine. Thank you.
var counter=var.register_start
M929 P"tmcregisters.txt" S3
while var.counter<=var.register_end
M569.2 P{var.driver_number} R{var.counter}
set var.counter=var.counter+1
G4 P200
M929 S0
2022-06-12 10:00:12 [info] Event logging started at level debug
2022-06-12 10:00:12 [info] Running: Duet 3 Mini5plus WiFi: 3.4.1rc1 (2022-05-03 09:34:52)
2022-06-12 10:00:12 [debug] Register 0x00 value 0x000001c0
2022-06-12 10:00:12 [debug] Register 0x01 value 0x00000001
2022-06-12 10:00:13 [debug] Register 0x02 value 0x0000000a
2022-06-12 10:00:13 [debug] Register 0x03 value 0x00000000
2022-06-12 10:00:13 [debug] Register 0x04 value 0x00000000
2022-06-12 10:00:14 [debug] Register 0x05 value 0x0000000e
2022-06-12 10:00:14 [debug] Register 0x06 value 0x21000040
2022-06-12 10:00:14 [debug] Register 0x07 value 0x0000000e
2022-06-12 10:00:15 [debug] Register 0x08 value 0x00000000
2022-06-12 10:00:15 [debug] Register 0x09 value 0x00000000
2022-06-12 10:00:15 [debug] Register 0x0a value 0x00000000
2022-06-12 10:00:15 [info] Event logging stopped